ASML Holding N.V. (ASML) and imec, a leading research and innovation hub in nanoelectronics and digital technologies, have agreed Tuesday (March 11) to collaborate on new strategic partnership focusing on research and sustainability.
The agreement will run for five years and aims to deliver valuable solutions in two areas.
Accordingly, the agreement aims to bring together the respective knowledge and expertise of ASML and imec. First, to develop solutions that advance the semiconductor industry. Second, to develop initiatives focused on sustainable innovation.

Targets Developing High-End Nodes

The collaboration incorporates ASML’s whole product portfolio, with a focus on developing high-end nodes, using ASML systems including 0.55 NA EUV, 0.33 NA EUV, DUV immersion, YieldStar optical metrology, and HMI (Hermes Microvision) single- and multi-beam technologies. These tools will be installed in imec’s state-of-the-art pilot line and incorporated in the NanoIC pilot line, which is funded by the European Union (EU) and the Flemish government. Particularly, the line provides the most advanced infrastructure for sub-2nm R&D to the international semiconductor ecosystem.
Focus areas for R&D will also include silicon photonics, memory and advanced packaging, offering full stack innovation for future semiconductor-based AI applications in diverse markets.
A new area in the collaboration consists of a significant contribution to fund innovative ideas and activities in imec’s research funnel that bring environmental and societal benefits.
ASML’s president and CEO Christophe Fouquet said the agreement signals ASML’s and imec’s resolve to develop solutions for the semiconductor industry. In addition, Fouquet said.
Meanwhile, Luc Van den hove, President and CEO at imec said, “The inclusion of ASML’s full product portfolio will allow us to expand and further mature the capabilities of our pilot line. (Thus), providing the entire semiconductor ecosystem with the most advanced R&D to tackle the challenges of AI-driven technological advancements. Since imec has a strong focus on sustainable innovation, having this explicitly included in our partnership is a great addition.”