Jenoptik is investing a low double-digit million-euro amount in a state-of-the-art system for the high-tech fab currently under construction in Dresden.

Accordingly, the new electron-beam lithography system (E-Beam) will be used to manufacture high-precision micro-optical components. Particularly, the production will cater to the company’s customers in the semiconductor and optical communication sectors.

The said e-beam system of Vistec Electron Beam GmbH will be delivered at the beginning of 2025.

Smallest structures with maximum precision

Accordingly, this type of e-beam lithography system can write structures with a precision in the 10nm range on substrates up to 300mm in diameter. This is approximately 1/2,000th of a hair.

Moreover, the Vistec SB3050-2 electron-beam lithography system leverages the Variable Shaped Beam principle. That is, enabling highly accurate and effective structuring even in large areas. The high degree of automation, combined with flexibility in terms of usable substrates, are the further features of the Vistec SB3050-2. Thus, enabling it to be used in an industrial environment. The system comes with Cell Projection functionality, opening up further possibilities for applications in micro-optics.

Jenoptik has been active in Dresden since 2007. With the new high-tech fab at Airportpark Dresden, the company is consolidating its production. Currently, the company spreads out its production across several small external sites. At the same time, the move allows them to expand its capacities.

The clean room production in the new fab will cover 2,000sq.m. particularly, the clean room areas of classes ISO5 and 3 meet the highest requirements for freedom from vibrations and temperature stability.

Most importantly, the new facility takes into account high environmental standards. Jenoptik is striving to fulfill the currently most comprehensive and stringent building criteria in terms of sustainability. Particularly, the “KfW 40 Standard” and the “LEED Gold Standard Certification”.

At the same time, the new fab will create high-quality jobs and the number of employees on site will increase further. The Saxon state capital will thus become the main location for the micro-optics sector.