Amtech Systems, Inc. has added another customer for its wafer cleaning system for silicon carbide (SiC) applications. Accordingly, this is the company’s 20th booking for the new OnTrak double-sided wafer scrubber system sold into SiC manufacturing applications.

The company, Amtech Systems, manufactures capital equipment, including thermal processing, wafer polishing, cleaning and related consumables and services. Most importantly, these services are critical in fabricating semiconductor devices, such as SiC silicon power and electronic assemblies. Particularly, focusing on enabling technologies for electric vehicles (EV) and clean technology (CleanTech) applications, announced today the booking of the 20^th new OnTrak double-sided wafer scrubber system sold into SiC manufacturing applications.

Suits 100 to 200mm Wafers

The latest booking came from Entrepix OnTrak customer in North America and expected shipment of the system is in the second half of the year. Previously, SiC-related wafer scrubbing system orders came from several customers in Europe, Asia, and North America, with the largest install base in Europe and North America.

The new OnTrak double-sided scrubber complements compound semiconductor applications with configurations for 100-200mm wafers and accommodation for even smaller wafers with custom designed carriers.

“Entrepix was an early mover into the SiC market. Even before the development of the new OnTrak double-sided wafer scrubber, they shipped many refurbished wafer cleaning systems into these fabs,” said Michael Whang, CEO of Amtech Systems. “The booking of the 20^th new OnTrak double-sided scrubber for use in Silicon Carbide processing shows the strength of Entrepix’s position this important market segment,” added Whang.

Focuses on IC Growth

Amtech Systems is a leading global manufacturer of capital equipment. This includes thermal processing, chemical mechanical polishing (CMP) technology, wafer cleaning, and related consumables used in fabricating semiconductor devices.  

In addition, the company sells process equipment and services to semiconductor device and module manufacturers worldwide, particularly in Asia, North America and Europe. The company’s strategic focus is on semiconductor growth opportunities in power electronics, sensors and analog devices. Accordingly, it leverages strength in core competencies in thermal and substrate processing.