THK Co., Ltd. has started accepting orders for the Miniature LM Guide (model number: AHR) with high acceleration and deceleration and low sliding.

Primarily, the Miniature LM Guide is a linear motion (LM) guide with high acceleration and deceleration performance that helps improve the production capacity of semiconductor chips. It combines the durability and low sliding performance of the miniature LM guide in high-speed, high-acceleration and deceleration movements. Additionally, it is compatible with the existing miniature LM guide that uses a two-row Gothic arch groove.

Mainly, the new ball circulation component allows the maximum speed to be 5m/s and the maximum acceleration/deceleration speed to 300m/s². Specifically, this is ideal for semiconductor manufacturing equipment that requires improved productivity. In particular, it is optimized for use in back-end semiconductor manufacturing equipment, such as die bonders and test handlers, which require high production performance, as well as spindle guidance parts such as chip mounters.

Further, THK will continue to contribute to technological innovation that advances with its solid technological capabilities. To this end, it will propose higher speeds, higher precision, smaller sizes, and longer service life for the semiconductor equipment industry, which is leading the way in next-generation technology.

High-speed and High-acceleration and Deceleration

The use of a newly developed ball circulation component has achieved high strength. It improves robustness during high-speed and high-acceleration/deceleration operations, contributing to improved productivity.

Low Sliding Resistance

THK’s core technology, the ideal four-row circular arc groove two-point contact structure, achieves low sliding motion. This contributes to the improvement of servo controllability.

Retracted Size Compatible

It is compatible with the existing miniature LM guide with Gothic arch grooves, so it can be replaced.

This is an online translation of a Japanese press release with slight editing made by Dempa.

-30 September 2024-