Toyo Technica Co., Ltd. will introduce the M91 FastHal Station equipped with a resistivity/Hall measurement system manufactured by U.S. company Lake Shore Cryotronics, Inc. Primarily, the new system can handle an expanded evaluation range of temperature characteristics.

Specifically, the M91 FastHall Station uses Lake Shore’s patented technology to perform resistivity/Hall effect measurements at high speed and with high accuracy. Resistivity/Hall effect measurement is one of the material evaluations of semiconductors. Also, it has the ability to support a wide range of temperature characteristics. Accordingly, it has made it possible to contribute to more efficient quality control in the production process.

This product was presented for the first time in Japan at the 85th Annual Meeting of the Japan Society of Applied Physics.

Background

Semiconductors and electronic materials are being developed for a variety of applications. These include power devices, solar cells, thermoelectric materials, new display materials, and organic materials. Recently, there is an increase in demand for semiconductors. Thus, improving production efficiency is necessary by measuring a wider range of materials faster in the semiconductor production process.

This time, Toyo Technica offers the M91 FastHall Station equipped with Lake Shore’s patented FastHall measurement technology, as a measurement system in the semiconductor production process. Although it is compact and space-saving, it does not require magnetic field reversal. Thus, it can measure at a higher speed than conventional resistivity/Hall measurement systems.

Also, it has the ability to handle from low temperatures (78K) to high temperatures (500K). Thus, it improves the efficiency of quality inspections on the production line of semiconductor materials such as wafers.

In addition, even in the field of basic research, measurement is possible even if it can only be obtained while changing the temperature. These include properties that cannot be seen by room temperature measurement alone, activation energy from changes in carrier concentration, and determination of the transition point of crystal structures where mobility changes suddenly.

Through the provision of the M91 FastHall Station, Toyo Technica will continue to contribute to improving the quality and efficiency of the semiconductor material production process.

Main Features

• Utilizing FastHall measurement technology to provide high convenience with high-speed, high-precision measurement;
• Utilizing Lake Shore’s patented technology (U.S. patent numbers: 9797965 and 10073151), high-speed and high-precision measurement is possible with a measurement method that does not reverse the magnetic field.
• Temperature characteristic evaluation range – Low temperature (78K) ~ High temperature (500K)
• Ideal for new semiconductor materials, like power device materials, solar cell materials, and thermoelectronic devices
• Equipped with MeasureLINK-MCS software – Specific resistance/Hall measurements can be made without programming, and can be customized with scripting.

This is an online translation of a Japanese press release with slight editing made by Dempa.

-18 September 2024-