Research and innovation organization imec has extended its strategic partnership with Japanese chip production equipment supplier Tokyo Electron (TEL).

Accordingly, the agreement marks the start of a new five-year phase in their long-standing alliance. Specifically, this new agreement will enable imec and TEL to deepen their joint R&D efforts in key areas such as next-generation patterning, advanced logic device processing, future memory development, and 3D integration. All these efforts aim towards the development of semiconductor nodes beyond 2nm. 

Results in High NA EUV

imec and TEL’s long-standing partnership started in 1995 and their purpose is to drive advances in patterning, logic, memory, and 3D integration. In fact, their collaboration has led to key breakthroughs in areas such as High Numerical Aperture (NA) Extreme Ultraviolet (EUV) lithography, etching, wet processing and, deposition.

One of the standout achievements was the joint development of EUV resist coating track technology. Moreover, this contributed significantly to improved defectivity control. Thus, playing a pivotal role in enabling the introduction of EUV technology into chip production.

High NA EUV lithography is providing more advanced pattern scaling solutions compared to conventional EUV lithography.

To Support Next-Wave of Chip Scaling

Building on this foundation, the renewed partnership will focus on co-developing tools and process technologies to support the next wave of semiconductor scaling.

Joint efforts will target High NA patterning technologies, aiming to boost performance through optimized material systems and improved defectivity control, as well as advanced deposition and etch solutions for next-generation CFET devices. Furthermore, the agreement also reflects a shared commitment to sustainability, with imec and TEL agreed to explore responsible manufacturing processes for future semiconductor nodes. 

Luc Van den hove, CEO of imec described the extended partnership as “truly a win-win”, building partnerships that will benefit the entire semiconductor ecosystem. “…It reinforces TEL’s technology leadership while cementing imec’s position as a global hub for advanced semiconductor research – driving innovation well into the next decade.”

Meanwhile, Toshiki Kawai, President and CEO of Tokyo Electron, said, “By leveraging imec’s expertise in process optimization and sustainability, we are confident we can deliver solutions that meet the performance and environmental demands of our global customer base.”

17 June 2025