Festo has started offering its VEFC mass flow controller to meet the needs of precision control for inert gases. Thanks to piezo technology, it is compact and flexible and offers an excellent price/performance ratio.

Accordingly, the mass flow controller is especially suitable for use in electronics manufacturing, food production, and anywhere in machine building. Specifically, where shielding gas is a requirement.

The mass flow controller VEFC from Festo is one of the most compact in the market, while capable of a flow rate of 200 l/min. Thanks to digitalization, the flow rate remains constant. For that reason, this dynamic, it is not necessary to manually adjust the directly controlled piezo valve for inert gases. Thus, it only takes milliseconds to precisely adjust the flow rates and their settings, and they remain tamper-proof.

Furthermore, this provides users with the flexibility they need for their production processes. In addition, the VEFC allows them to continuously monitor processes since the flow rate and output pressure are always transparent.

Reliable protection of wafers

Reliably controlling the flow of inert gases such as nitrogen is particularly important in the semiconductor industry. Specifically, this has helped prevent damages in wafers. By focusing on inert gases without media separation, the VEFC proves to be a favorable alternative to other solutions on the market when controlling nitrogen in load ports or EFEMs.

Economical, reliable, and precise N2 purging

It is possible to control different flow rates in the individual purge steps by having VEFC in the load port. Thus, it ensures to utilize the absolutely necessary amount of nitrogen. Whether during pre-blowing, pre-purge, process purge, and post-purge. For that reason, users can save nitrogen and shorten the processing time until the dry shielding gas atmosphere has been reached.

Festo is a global player and an independent family-owned company with headquarters in Esslingen am Neckar, Germany. Festo has set standards in industrial automation technology and technical education ever since its establishment. Therefore, making a contribution to sustainable development of the environment, the economy, and the society.

The company supplies pneumatic and electrical automation technology to 300,000 customers of factory and process automation in over 35 industries. Digitalization, AI and the LifeTech sector with medical technology and laboratory automation are becoming increasingly important.

The products and services are available in 176 countries. With about 20,600 employees in over 250 branch offices in around 60 countries worldwide, Festo achieved a turnover of around €3.65 billion in 2023. Each year, around 7% of this turnover goes in research and development. Festo Didactic SE is a leading provider of technical education and training and offers its customers worldwide comprehensive digital and physical learning solutions in the industrial environment.

17 September 2024